HIGH PRESSURE RF-DC SPUTTERING AND METHODS TO IMPROVE FILM UNIFORMITY AND STEP-COVERAGE OF THIS PROCESS - diagram, schematic, and image 14
Conformal metal thin-film coatings in high-aspect-ratio trenches using a self-sputtered rf-driven plasma source: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena: Vol 25, No 4
Korean Journal of Metals and Materials
Effects of deposition conditions on step-coverage quality in low-pressure chemical vapor deposition of HfO2 - ScienceDirect
Structural devices - OpenLearn - Open University
Optimizing of process parameter and further step coverage improving regarding copper seed deposition for 50nm NAND flash | Semantic Scholar
Principle of Thin Film Deposition
Chapter 9 Thin film deposition 1 2 3
PPT - Chapter 9 Thin film deposition PowerPoint Presentation, free download - ID:1085012
Dependence of step coverage on deposition temperature. Step coverage is... | Download Scientific Diagram
Coatings | Free Full-Text | Optical Constant and Conformality Analysis of SiO2 Thin Films Deposited on Linear Array Microstructure Substrate by PECVD | HTML
Sputtering | Queen's Advanced MicroEngineering Centre
PPT - What determines step coverage in sputtering? PowerPoint Presentation - ID:3373536
HIGH PRESSURE RF-DC SPUTTERING AND METHODS TO IMPROVE FILM UNIFORMITY AND STEP-COVERAGE OF THIS PROCESS - diagram, schematic, and image 13
Step coverage obtained from experiments and the corresponding... | Download Scientific Diagram
Enhanced step coverage by oblique angle physical vapor deposition: Journal of Applied Physics: Vol 97, No 12
Conformality - an overview | ScienceDirect Topics
Enhanced step coverage by oblique angle physical vapor deposition: Journal of Applied Physics: Vol 97, No 12
PDF) Enhanced step coverage by oblique angle physical vapor deposition
Step coverage study of indium-tin-oxide thin films by spray CVD on non-flat substrates at different temperatures - ScienceDirect
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Chapter 9 Thin film deposition 1 2 3
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Monte Carlo simulations of sputter deposition and step coverage of thin films - ScienceDirect
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